SANJSCOPE™ EZ-THERM Series
The right thermal imaging system for your lab today
Infrared (IR), Thermoreflectance (TR), or both configure the EZ Series for the measurement you need today, and upgrade as your requirements grow on the same platform.
Trusted across the industry
Configuration
Four ways to configure the EZ Series
All configurations share the same irCONTROLLER and SanjVIEW™ software platform. Start with what your measurement requires.
Infrared (IR) Thermal Imaging
Wide-field lock-in infrared thermography for rapid screening of packages, PCBs, and devices. The fastest way to find a hot spot before committing to a detailed characterization.
- Wide field of view — up to 72 × 61 mm
- Excellent thermal sensitivity on non-metals
- Probe station mountable
Thermoreflectance (TR) Imaging
Visible-light thermoreflectance for sub-micron resolution thermal imaging on any surface, including metals, bond pads, and gate regions where IR cameras produce no signal.
- Works on metal contacts and surfaces
- Sub-micron spatial resolution
- 5 µs time resolution
IR + TR Combined
Both modalities in one station, one controller, one software session. Macroscale imaging with IR to find the region of interest, then switch to TR for sub-micron characterization without moving the device.
- Full IR screening capability
- Full TR characterization capability
- Single SanjVIEW™ session — no re-setup
Open Circuit Detection
Locates open circuits in complex 2D and 3D multi-layer packages and PCBs using IR imaging combined with an active RF excitation signal. The system injects an RF signal at a selected contact point current stops flowing at the open, the IR camera detects it thermally. SanjVIEW controls frequency and power level automatically.
Use cases
- Open circuits in 2D and 3D heterogeneous packages
- Buried opens in multi-layer PCBs
- Large PCBs up to 17 × 17 inches (PCB-IR stand)
- Production reliability screening
- Multi-layer stack failure localization
Use your own probe station
Works with existing setups
All EZ Series configurations mount to standard probe stations with a C-mount-compatible IR housing. No proprietary fixtures required; compatible with gantry-style, manual, and semi-automatic probe stations from major manufacturers.
Standard C-mount interface
IR sensor housing mounts to most probe station microscope ports without modification.
Wafer-level and packaged device support
4-inch chuck (CPS-400) or 6-inch chuck (SPS-600) available from Microsanj; compatible with third-party stations.
TTL trigger synchronization
Input or output TTL-compatible trigger — integrates with existing device bias and test setups.
Adjustable working distance
160 mm at 0.1x to 32 mm at 0.5x — clears most probe arm configurations.
What's Included
Shared across the EZ platform
Every EZ Series configuration ships as a complete, turnkey system. No integration work required.
SanjVIEW™ + SanjANALYZER™
System management, data acquisition, lock-in control, and thermal data analysis — included with every configuration.
Lock-in technique
Repeated measurement averaging enhances SNR significantly. Thermal sensitivity in the mK range with 5–20 minutes averaging time.
+10°C to +500°C range
Measurements from 10°C to 300°C in high-gain mode, up to 500°C in low-gain mode. Thermocouple included.
UL / RoHS / CE / UKCA
All EZ configurations are certified for safety compliance in US, EU, and UK markets.
Internal DUT bias supply
Pulsed −10V to +10V, 500 mA max. Fixed DC −10V to +10V. TTL-compatible synchronization input and output.
Platform upgrade path
Add NOSH-TDTR to NT220 or EZ530 for single-point materials and structural analysis with ns temporal resolution and sub-micron spatial resolution.
Specification comparison
EZ Series — configurations at a glance
Key performance parameters for the three thermal imaging configurations. OpenTest shares the IR sensor specifications.
| Parameter | IR Thermal Imaging | Thermoreflectance (TR) | IR + TR Combined |
|---|---|---|---|
| Thermal sensitivity | <15 mK (lock-in, 5 min) | ~100 mK (lock-in, 5 min) | Both modalities available |
| Spatial resolution | 25 µm/pixel @ 0.5x | 59 nm/pixel @ 100x | 25 µm (IR) / 59 nm (TR) |
| Time resolution | 33 ms (30 fps) | 5 µs (EZ530A-05) | 5 µs (TR) / 33 ms (IR) |
| Works on metals | No (low emissivity) | Yes | Yes (TR mode) |
| Field of view | 72 × 61 mm @ 0.1x | 2.3 × 1.4 mm @ 5x | Both available |
| Temperature range | +10°C to +500°C | Same as IR | Same as IR |
| NOSH-TDTR compatible | No | Yes | Yes |
Platform upgrade path
Your EZ investment carries forward
Add capability with NOSH-TDTR or upgrade to the NT220 system without starting over. Your measurement data, workflows, and SanjVIEW software familiarity all transfer.
NOSH-TDTR™
Optical pump-probe · materials characterization
Add a pump laser to your existing EZ-THERM system and gain thermal conductivity, thermal boundary resistance, and die-level subsurface analysis without replacing your imaging system. Compatible with the EZ-THERM TR and IR+TR configurations.
NT Series
Flagship · higher resolution · faster transients
When your application outgrows EZ-THERM time or spatial resolution, switch to the NT220 for 50 ns standard pulse width (500 ps optional), sub-300 nm spatial resolution, and software-selectable wavelengths from 365 nm to 1700 nm, including through-substrate NIR imaging.
Not sure which EZ configuration fits?
Our applications team has worked with labs at every stage from their first thermal imaging purchase to a full platform build-out.
Tell us your device type and measurement goal, and our team is happy to assist.
