SanjSCOPE™ EZ-THERM Lock-In Thermal Imaging System

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The SanjSCOPE™ EZ-THERM LOCK-IN THERMAL IMAGING CAMERA SYSTEM provides an affordable platform to support both LOCK-IN INFRARED EMISSION THERMOGRAPHY and LOCK-IN THERMOREFLECTANCE IMAGING. The EZ-THERM system comprises the EZ500A Controller with a selection of high-performance INFRARED (IR) or THERMOREFLECTANCE (TR) sensors to address a wide range of thermal imaging applications and requirements. The sensors are easily integrated to existing semiconductor test systems and the EZ500A Controller can simultaneously support up to three sensors. 

LOCK-IN THERMAL IMAGING

The lock-in technique enables repeated measurements to be made over time to significantly improve the signal to noise ratio and subsequently enhance the thermal sensitivity. With this approach, thermal sensitivities in the 1 mK range can be achieved enabling detection of hot spots with power levels less than 10 microwatts with san IR sensor. With TR sensors, diffraction-limited spatial resolution addresses the resolution required for today’s advanced devices.

TEMPERATURE CALIBRATION

The EZ500A supports multiple techniques for temperature calibration. Included with the EZ500A is a high-resolution thermocouple for monitoring the temperature of the device under test (DUT). The EZ500A can also be connected to an embedded thermal sensor. An optional Thermal Chuck is also available from Microsanj for added calibration flexibility. A proprietary TransientCAL™ technique is used to obtain an emissivity map for the DUT for temperature accuracy.

The EZ500A EZ-THERM LOCK-IN THERMAL IMAGING CAMERA SYSTEM includes:

  • Controller with lock-in electronics for high-resolution thermal imaging

  • Embedded User-Friendly SanjVIEW™ and SanjANALYZER™ SW with advanced algorithms for system management, data acquisition, and data analysis

  • TransientCAL™ technique for temperature calibration and emission mapping

  • High-resolution thermocouple for temperature sensing

  • High-performance monitor, keyboard, & mouse

  • All necessary cables for installation and connection to customer-provided optical system and probe station

  • User installation guide and operating manual


 

TECHNICAL SPECIFICATION

EZ500 Thermal Imaging System

System Description: Bench-Top System for Top-Side Imaging with Optional Dual Mode Functionality
Transient Resolution: 50 microseconds
Sensors: CMOS for TR Mode, VO Micro-bolometer for IR Mode
Spectral Range: 400 nm to 800 nm for TR Mode, 7.5 microns to 13.5 microns for IR Mode
Active Thermal Pixels: 1920 x 1200 for TR Mode, 640 x 512 for IR Mode
Pixel Size: 5.86 microns
Spatial Resolution: 59 nm/pixel @100x
NETD: 100mK (5 minute average) in TR Mode, 5mK in IR Mode
Software: SanjVIEW™ for control, analysis, & automation
Illumination Sources: 9 Selectable wavelengths in VIS band